In a method for forming a micromechanical device, a force associated with operation of the device is varied between locations spaced across a conductive element of the device. The method may be used to form a switch adapted such that a force associated with actuation of the switch varies between locations...http://www.google.de/patents/US6707355?utm_source=gb-gplus-sharePatent US6707355 - Gradually-actuating micromechanical device
