A deposition system is used for depositing particles onto a substrate, such as a wafer in a deposition chamber. The particles are carried in an aerosol that is generated by an atomizer that includes an impaction plate for removing large particles before the aerosol is discharged, and which has an output...http://www.google.de/patents/US6607597?utm_source=gb-gplus-sharePatent US6607597 - Method and apparatus for deposition of particles on surfaces
