A modular semiconductor wafer processing system comprises a plurality of detachable process reactors and other types of generators that can be quick-clamped to any of several ports on the lid of a circular wafer handling chamber. A multiple-spoke single-axis rigid-arm transfer carousel centrally located...http://www.google.de/patents/US5863170?utm_source=gb-gplus-sharePatent US5863170 - Modular process system
