Robotic reticle manipulators are disclosed for use in holding and conveying, with good stability, thin, circular reticles as used in charged-particle-beam microlithography. A manipulator embodiment includes at least one arm configured for executing movements in the X-, Y-, and Z-directions. Connected...http://www.google.de/patents/US6906790?utm_source=gb-gplus-sharePatent US6906790 - Reticle manipulators and related methods for conveying thin, circular reticles as used in charged-particle-beam microlithography
