It is an object to provide a laser apparatus, a laser irradiating method and a manufacturing method of a semiconductor device that can perform uniform a process with a laser beam to an object uniformly. The present invention provides a laser apparatus comprising an optical system for sampling a part...http://www.google.de/patents/US7223306?utm_source=gb-gplus-sharePatent US7223306 - Laser apparatus, laser irradiation method, and manufacturing method of semiconductor device
