An optical exposure method and a device are used for forming patterns on a printed board wiring or semiconductor board. A single exposing region of a surface to be exposed is irradiated with a plurality of optical beams having different irradiating areas and different scanning pitches, such as, a peripheral...http://www.google.de/patents/US7179584?utm_source=gb-gplus-sharePatent US7179584 - Exposure method and device for forming patterns on printed wiring board
