An inkjet print cartridge comprising a printhead that is formed using a sequence of etch process steps is described. The first etch of the two etch step process is comprised of a wet chemical etch. A dry etch process follows. Both etch steps are consecutively initiated from the back of the wafer. The...http://www.google.de/patents/US6534247?utm_source=gb-gplus-sharePatent US6534247 - Method of fabricating micromachined ink feed channels for an inkjet printhead
