Provided is a coating film forming apparatus capable of shortening an operating time without considerably altering the design of the apparatus and changing the physical properties of a material such as a resist solvent. A spin coater for spreading a coating solution 5 dropped onto a substrate 1 to be...http://www.google.de/patents/US6383294?utm_source=gb-gplus-sharePatent US6383294 - Coated film forming apparatus
