Disclosed herein is a method and an apparatus for applying a coating liquid to an object from a liquid-applying member at a first prescribed position, thereby forming a film on the object. Before the coating liquid at the first position, the coating liquid is applied at a second predetermined position....http://www.google.de/patents/US6268013?utm_source=gb-gplus-sharePatent US6268013 - Coating a resist film, with pretesting for particle contamination
