A plurality of diffused resistors and a plurality of wirings (resistive elements) are alternately disposed along a virtual line, and those diffused resistors and wirings are connected in series by contact vias. In the same wiring layer as that of the wirings, a dummy pattern is formed so as to surround...http://www.google.de/patents/US6992327?utm_source=gb-gplus-sharePatent US6992327 - Monitor pattern of semiconductor device and method of manufacturing semiconductor device
