The present invention includes electronic device workpieces, methods of semiconductor processing and methods of sensing temperature of an electronic device workpiece. In one aspect, the invention provides an electronic device workpiece including: a substrate having a surface; a temperature sensing device...http://www.google.de/patents/US6744346?utm_source=gb-gplus-sharePatent US6744346 - Electronic device workpieces, methods of semiconductor processing and methods of sensing temperature of an electronic device workpiece
