A micromachined device for efficient thermal processing at least one fluid stream includes at least one fluid conducting tube having at least a region with wall thickness of less than 50 m. The device optionally includes one or more thermally conductive structures in thermal communication with first...http://www.google.de/patents/US20030027022?utm_source=gb-gplus-sharePatent US20030027022 - Thermally effcient micromachined device
