A method for forming a thin film resistor includes providing a sputter target having one or more silicon containing components and chromium diboride. For example, the one or more silicon containing components may include silicon and/or silicon carbide. The resistor film is then sputter deposited on a...http://www.google.de/patents/US6129742?utm_source=gb-gplus-sharePatent US6129742 - Thin film resistor for use in medical devices and method of making same
