Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic...http://www.google.de/patents/US20050231790?utm_source=gb-gplus-sharePatent US20050231790 - Method and device for modulating light with a time-varying signal