Wavelength dispersion of intensity of light reflected from an evaluation object is measured. A complex refractive index of a substance forming the evaluation object and the environment are prepared. Virtual component ratios comprising a mixture ratio of the substances forming the evaluation object and...http://www.google.de/patents/US7483155?utm_source=gb-gplus-sharePatent US7483155 - Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus
