A semiconductor integrated circuit has a CMOS transistor formed on a first conductivity type semiconductor film provided on a first conductivity type supporting substrate through an embedded insulating film. Thermal oxidation is conducted to form a LOCOS for element separation between transistors in...http://www.google.de/patents/US7253048?utm_source=gb-gplus-sharePatent US7253048 - Method of manufacturing a semiconductor integrated circuit and semiconductor integrated circuit
