A confocal three dimensional inspection system, and process for use thereof, allows for inspecting of bumps and other three dimensional (3D) features on wafers and other semiconductor substrates. The sensor eliminates out of focus light using a confocal principal to improve depth response. This process...http://www.google.de/patents/US6731383?utm_source=gb-gplus-sharePatent US6731383 - Confocal 3D inspection system and process
