A metal-semiconductor-metal (MSM) photodetector in a silicon substrate. An insulating layer overlies the silicon substrate. An active layer is carried on the insulating layer and is separated from the silicon substrate. The active layer has an active layer thickness. Interdigitated fingers are carried...http://www.google.de/patents/US5461246?utm_source=gb-gplus-sharePatent US5461246 - Photodetector with first and second contacts
