A method for manufacturing a thin film transistor and a display device using a small number of masks is provided. A conductive film is formed, a thin-film stack body having a pattern is formed over the conductive film, an opening portion is formed in the thin-film stack body so as to reach the conductive...http://www.google.de/patents/US7883943?utm_source=gb-gplus-sharePatent US7883943 - Method for manufacturing thin film transistor and method for manufacturing display device
