An optical inspection system for inspecting a substrate includes a light detector, a light source, a deflection system, an objective lens and an optical system. The light source produces an illuminating beam directed along a path to the substrate. The deflection system scans the illuminating beam on...http://www.google.de/patents/US6122046?utm_source=gb-gplus-sharePatent US6122046 - Dual resolution combined laser spot scanning and area imaging inspection
