A high quality-factor, tunable radio frequency or microwave resonator is disclosed. The resonator includes one or more microelectromechanical switches positioned along its length. The switches are comprised of metal membrane bridges spanning the microstrip resonator. The bridges are connected to radial...http://www.google.de/patents/US6452465?utm_source=gb-gplus-sharePatent US6452465 - High quality-factor tunable resonator
