A method is disclosed for evaluating isolated and aperiodic structure on a semiconductor sample. A probe beam from a coherent laser source is focused onto the structure in a manner to create a spread of angles incidence. The reflected light is monitored with an array detector. The intensity or polarization...http://www.google.de/patents/US6842259?utm_source=gb-gplus-sharePatent US6842259 - Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurements
