A method for fabricating chalcogenide materials on substrates, which reduces and/or eliminates agglomeration of materials on the chalcogenide materials; and system and devices for performing the method, semiconductor devices so produced, and machine readable media containing the method. One method disclosed...http://www.google.de/patents/US6878569?utm_source=gb-gplus-sharePatent US6878569 - Agglomeration elimination for metal sputter deposition of chalcogenides
