A system and method for reliably cleaning the nozzle face of each head while flexibly coping with changes in specification for a product to be manufactured. The film forming apparatus has a plurality of heads for jetting droplets, each having an nozzle in a nozzle face; and a common head cleaning mechanism...http://www.google.de/patents/US7491271?utm_source=gb-gplus-sharePatent US7491271 - Film forming apparatus, head cleaning method, device manufacturing system, and device
