Chambers, systems, and methods for electrochemically processing microfeature workpieces are disclosed herein. In one embodiment, an electrochemical deposition chamber includes a processing unit having a first flow system configured to convey a flow of a first processing fluid to a microfeature workpiece....http://www.google.de/patents/US7585398?utm_source=gb-gplus-sharePatent US7585398 - Chambers, systems, and methods for electrochemically processing microfeature workpieces
