A micro-electromechanical liquid ejection device includes a substrate that defines a liquid inlet channel. Drive circuitry is positioned on the substrate. A nozzle chamber structure is positioned on the substrate and defines a nozzle chamber in fluid communication with the liquid inlet channel and a...http://www.google.de/patents/US7083264?utm_source=gb-gplus-sharePatent US7083264 - Micro-electromechanical liquid ejection device with motion amplification
