A surface reaction process for controlled oxide growth is disclosed using a directed, low energy ion beam for compound or oxide formation. The technique is evaluated by fabricating Ni-oxide-Ni and Cr-oxide-Ni tunneling junctions, using directed oxygen ion beams with energies ranging from about 30 to...http://www.google.de/patents/US4351712?utm_source=gb-gplus-sharePatent US4351712 - Low energy ion beam oxidation process
