A reactor for electrochemically processing at least one surface of a microelectronic workpiece is set forth. The reactor comprises a reactor head including a workpiece support that has one or more electrical contacts positioned to make electrical contact with the microelectronic workpiece. The reactor...http://www.google.de/patents/US7566386?utm_source=gb-gplus-sharePatent US7566386 - System for electrochemically processing a workpiece
