A process cycles between etching and passivating chemistries to create rough sidewalls that are converted into small structures. In one embodiment, a mask is used to define lines in a single crystal silicon wafer. The process creates ripples on sidewalls of the lines corresponding to the cycles. The...http://www.google.de/patents/US7339244?utm_source=gb-gplus-sharePatent US7339244 - Small scale wires with microelectromechanical devices
