A micro-pump having a first layer, a second layer and an intermediate flexible layer is disclosed. The first layer and second layer may be of moldable plastics. The intermediate layer may be a substantially flat PDMS membrane layer having an inlet hole and an outlet hole. The first layer and the second...http://www.google.de/patents/US20050074340?utm_source=gb-gplus-sharePatent US20050074340 - Micro-pump
