A system and method for coherent optical inspection are described. In one embodiment, an illuminating beam illuminates a sample, such as a semiconductor wafer, to generate a reflected beam. A reference beam then interferes with the reflected beam to generate an interference pattern at a detector, which...http://www.google.de/patents/US7327464?utm_source=gb-gplus-sharePatent US7327464 - System and method for coherent optical inspection
