An electrostatically deflectable beam spatial light modulator with the beams (30), address electrodes (42, 46), and landing electrodes (40, 41) to provide soft-landing of the beams on the landing electrodes (40, 41) which gives uniform large-angle deflection plus high reliability....http://www.google.de/patents/US5061049?utm_source=gb-gplus-sharePatent US5061049 - Spatial light modulator and method
