Film forming equipment (20) is provided with a treatment container (22), a gas supplying system for supplying the container with a treatment gas including a film forming gas, and an exhaust system for exhausting the atmosphere in the container. In the treatment container, a placing table (46) having...http://www.google.de/patents/US7718005?utm_source=gb-gplus-sharePatent US7718005 - Film forming equipment and film forming method
