Described are methods for patterning a substrate by imprint lithography. Imprint lithography is a process in which a liquid is dispensed onto a substrate. A template is brought into contact with the liquid and the liquid is cured. The cured liquid includes an imprint of any patterns formed in the template....http://www.google.de/patents/US6916584?utm_source=gb-gplus-sharePatent US6916584 - Alignment methods for imprint lithography
