A liquid short-chain polymer of the general formula R.sub.a Si(OH).sub.b or (R).sub.a SiH.sub.b (OH).sub.c is deposited on a substrate, where a+b=4 or a+b+c=4, respectively, a, b and c are integers, R is a carbon-containing group and a silicon to carbon bond is indicated by Fourier Transfer Infrared...http://www.google.de/patents/US6242366?utm_source=gb-gplus-sharePatent US6242366 - Methods and apparatus for treating a semiconductor substrate
