A device comprising movable micro-structures configured to contact a substrate is disclosed. The substrate has a metal-insulator-metal construction with an upper metal layer and an insulator being patterned to provide substrate contact regions to a lower metal layer. The micro-structures have metal under...http://www.google.de/patents/US6813059?utm_source=gb-gplus-sharePatent US6813059 - Reduced formation of asperities in contact micro-structures
