A method of manufacturing a photomask includes: ejecting droplets of a liquid containing a light-shielding material at predetermined positions on a substrate using a droplet ejection method, and drying the liquid to form a light-shielding pattern on the substrate, the light-shielding pattern containing...http://www.google.de/patents/US7776492?utm_source=gb-gplus-sharePatent US7776492 - Photomask, manufacturing method thereof, and manufacturing method of electronic device
