Methods of producing an electromechanical circuit element are described. A lower structure having lower support structures and a lower electrically conductive element is provided. A nanotube ribbon (or other electromechanically responsive element) is formed on an upper surface of the lower structure...http://www.google.de/patents/US6784028?utm_source=gb-gplus-sharePatent US6784028 - Methods of making electromechanical three-trace junction devices
