A device for measuring acceleration based on the shift in resonant frequency of a vibrating cantilevered beam in response to an acceleration force having a component along its major axis is disclosed. Such accelerometers may be manufactured by micromachining in silicon, and comprise one or more beams,...http://www.google.de/patents/US5461918?utm_source=gb-gplus-sharePatent US5461918 - Vibrating beam accelerometer
