A probe card, a test method and a test system for testing semiconductor wafers are provided. The test system includes the probe card, a tester for generating test signals, and a wafer prober for placing the wafers and probe card in physical contact. The probe card includes contacts for electrically engaging...http://www.google.de/patents/US6246250?utm_source=gb-gplus-sharePatent US6246250 - Probe card having on-board multiplex circuitry for expanding tester resources
