A micro-electromechanical fluid ejection device includes a substrate that defines a fluid inlet channel and incorporates a wafer and CMOS layers positioned on the wafer. A nozzle chamber structure is positioned on the substrate to define a nozzle chamber in fluid communication with the fluid inlet channel...http://www.google.de/patents/US7066575?utm_source=gb-gplus-sharePatent US7066575 - Micro-electromechanical fluid ejection device having a buckle-resistant actuator
