A wafer viewer system is provided for graphical presentation and analysis of a wafer and a wafer series. More specifically, the wafer viewer system includes a graphical user interface for displaying a wafer, graphically selecting regions of the wafer for analysis, performing analysis on the selected...http://www.google.de/patents/US7945085?utm_source=gb-gplus-sharePatent US7945085 - User interface for wafer data analysis and visualization
