A wafer holder which grips a wafer by its edges is disclosed. The wafer holder is mounted on a spindle assembly which spins the wafer so held, for example, to spin dry both the front and back side of the wafer. The wafer holder includes two pairs of wafer holding bumpers, each pair coupled to one end...http://www.google.de/patents/US5566466?utm_source=gb-gplus-sharePatent US5566466 - Spindle assembly with improved wafer holder
