An exposure apparatus has a triangular shaped stage which is movable in a two-dimensional plane while holding a substrate. The stage has a reflecting surface provided on a side face of the stage so that the surface extends in a specific direction intersecting Y axis and X axis. An interferometer radiates...http://www.google.de/patents/US20030128348?utm_source=gb-gplus-sharePatent US20030128348 - Stage apparatus, scanning type exposure apparatus, and device produced with the same
