For optimizing the yield of atomized-off material on a magnetron atomization source, a process space, on the source side, is predominantly walled by the atomization surface of the target body. The magnetron atomization source has a target body with a mirror-symmetrical, concavely constructed atomization...http://www.google.de/patents/US6776881?utm_source=gb-gplus-sharePatent US6776881 - Magnetron atomization source and method of use thereof
