An integrated circuit test wafer quickly detects A-C defects in any process by which the wafer is fabricated. This test wafer includes a semiconductor substrate having a major surface, and a diagnostic circuit that is repeatedly integrated over most of the wafer's surface. Each diagnostic circuit includes:...http://www.google.de/patents/US5266890?utm_source=gb-gplus-sharePatent US5266890 - Test wafer for diagnosing flaws in an integrated circuit fabrication process that cause A-C defects
