An integrated circuit includes at least one porous silicon oxycarbide (SiOC) insulator, which provides good mechanical strength and a low dielectric constant (e.g., R<2) for minimizing parasitic capacitance. The insulator provides IC isolation, such as between circuit elements, between interconnection...http://www.google.de/patents/US6710428?utm_source=gb-gplus-sharePatent US6710428 - Porous silicon oxycarbide integrated circuit insulator
