An on-board micro-electromechanical (MEMS) isolator is provided on board a power semiconductor device for measuring voltage, current, or both. In particular, the power semiconductor may comprise a plurality of transistors connected in parallel, such that a MEMS isolator connected in parallel with one...http://www.google.de/patents/US6690178?utm_source=gb-gplus-sharePatent US6690178 - On-board microelectromechanical system (MEMS) sensing device for power semiconductors
