A plasma device which is provided with a container, a gas supply system, and an exhaust system. The container is composed of a first dielectric plate made of a material capable of transmitting microwaves. An antenna for radiating microwaves is located on the outside of the container, and an electrode...http://www.google.de/patents/US6357385?utm_source=gb-gplus-sharePatent US6357385 - Plasma device
