A liquid-filled balloon may be positioned between a workpiece, such as a semiconductor structure covered with a photoresist, and a lithography light source. The balloon includes a thin membrane that exhibits good optical and physical properties. Liquid contained in the balloon also exhibits good optical...http://www.google.de/patents/US20050158673?utm_source=gb-gplus-sharePatent US20050158673 - LIQUID-FILLED BALLOONS FOR IMMERSION LITHOGRAPHY
